Good performance RF-MEMS SP2T switches in CPW configuration for space applications.

Coplanar (CPW) waveguide based on cantilever or clamped-clamped switches have been developed for use in space applications. All the devices are manufactured on high-resistive silicon using surface micro-machining technology. The SP2T switches provide very good performance in terms of insertion and return loss and isolation over a wide frequency band. These switches are intended to be used as building blocks for large order switching matrices for satellite applications. Full wave simulations and measured RF performances are shown to be in very good agreement, showing high performance for all SPST typologies. Depending on the specific design, insertion loss -20dB, return loss between -5dB and -15dB and isolation between -20dB and -23dB has been obtained in the 0-40 GHz frequency band. In this paper implementation of HFSS (High Frequency Structure Simulator) is done to take desired results.