Surface micromachined RF MEMS SP9T switch for 60 GHz ISM band antenna sectoring applications

This work presents a radio frequency microelectromechanical system (RF MEMS) based single-pole-nine-throw (SP9T) switch integrated with an antenna at 60 GHz. The device is fabricated on 635 μm alumina substrate using surface micromachining process. SP9T switch features a simulated return loss of > 14 dB, isolation of > 16 dB and insertion loss of ≤ 0.41 dB over the frequency band of 55-65 GHz. Total area of the SP9T switch is 0.75 mm2. The proposed work is a preliminary prototype for the proof of concept of antenna sectoring at 60 GHz for ISM applications. To validate the principle of operation, a single patch antenna element is incorporated with one of the RF output port of MEMS SP9T switch. The integrated antenna exhibits a simulated return loss of 30 dB, and 10 dB impedance bandwidth of 4.17 % at 60 GHz. Also, a simulated gain of 6.75 dB is achieved, when switch is in actuated state. Total area of the device is ~ 5.45 mm2. Fabricated device is also presented in the paper.