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2019•Journal of Manufacturing SystemsRequires access

A method for wafer assignment in semiconductor wafer fabrication considering both quality and productivity perspectives

Dong‐Hee Lee, Chang-Ho Lee, Seung-Hyun Choi, Kwang-Jae Kim

Open publisher page 33 citations

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Key concepts: Wafer, Wafer fabrication, Process (computing), Semiconductor device fabrication, Quality (philosophy), Productivity, Wafer backgrinding, Yield (engineering)

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