Proposal of a Precision Probe-Tilt Adjustment with the RF Signal Detection Technique

This study proposes a precision probe-tilt adjustment for an on-wafer measurement system. An original probe station with an electro-actuating goniometer stage was constructed to demonstrate the proposed technique. The tilt angle of a probe was shifted in the adjustment operation to acquire the S-parameter. The acquired S-parameter was analyzed to determine the angle of the goniometer stage, where the probe tip was aligned parallel to the substrate. The tilt angle was repeatedly estimated as ± 0.35 degree, which is over one degree in a conventional adjustment technique by direct observation with a microscope.