2018•New Physics Sae MulliRequires access

Crystal Structure and Surface Characteristics of ZnO Thin Films Deposited by Using RF Magnetron Sputtering

Bong Ju Lee, Myung Bok LEE

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Key concepts: Materials science, Sputter deposition, Sputtering, Optoelectronics, Thin film, Crystal (programming language), Cavity magnetron, Nanotechnology

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Crystal Structure and Surface Characteristics of ZnO Thin Films Deposited by Using RF Magnetron Sputtering — Research Paper | ScholarLens