2004•VacuumRequires access

Synthesis of high-density MgO films by a novel magnetron sputtering system

Kyung H. Nam, Min J. Jung, Jeon G. Han, T. Kopte, U. Hartung, C. Peters

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Key concepts: Cavity magnetron, Sputter deposition, Materials science, Substrate (aquarium), Microstructure, Optoelectronics, Thin film, Electronic engineering