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2018•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Effect of helium ion beam treatment on wet etching of silicon dioxide

Yu. V. Petrov, Evgeniy A. Grigoryev, T. V. Sharov, Alexander Petrovich Baraban

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Key concepts: Etching (microfabrication), Silicon dioxide, Helium, Ion, Silicon, Hydrofluoric acid, Materials science, Irradiation

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