Alexander Kusch, Marc Christopher Wurz, Erik Bunert, Stefan Zimmermann
Abstract
In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
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In this work, a p-Si field emitter array produced by wafer dicing is presented. Different strategies to produce a variety of shapes of the tips are shown. The resulting arrays show excellent emission characteristics compared to other field emitter, like carbon nano tubes.
Key concepts: Wafer dicing, Wafer, Common emitter, Materials science, Optoelectronics, Silicon, Field electron emission, Field (mathematics)