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25a-F-6 Effect of H ion double implantation on ion implanted amorphuos SiO

Takayuki Fujita, M. Fukui, Sohei Okada, Nobuyasu Itoh, Tatsumi Hioki

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Key concepts: Ion implantation, Ion, Materials science, Physics, Quantum mechanics

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25a-F-6 Effect of H ion double implantation on ion implanted amorphuos SiO — Research Paper | ScholarLens