Analysis of subthreshold characteristics of p-MOSFETs with (0/90°) and 45° channel orientation
T. Matsuda, H. Hanai, F. Asano, H. Iwata, T. Ohzone
Abstract
T. Matsuda, H. Hanai, F. Asano, H. Iwata, T. Ohzone
Abstract
Subthreshold characteristics of CMOS devices become important for mixed signal SOCs (System On a Chip) [1]. Since matching of critical devices in important parameters such as IDsat (saturation drain current), Vτ (threshold voltage), gm (transconductance) and S (subthreshold slope) are important in CMOS analog circuit design, channel orientation and current flow direction should be carefully arranged in LSI design. In this paper, orientation dependence and asymmetry of subthreshold characteristics in 0.18 μm p MOSFET are analyzed using the test structure designed in our previous work [2].
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Subthreshold characteristics of CMOS devices become important for mixed signal SOCs (System On a Chip) [1]. Since matching of critical devices in important parameters such as IDsat (saturation drain current), Vτ (threshold voltage), gm (transconductance) and S (subthreshold slope) are important in CMOS analog circuit design, channel orientation and current flow direction should be carefully arranged in LSI design. In this paper, orientation dependence and asymmetry of subthreshold characteristics in 0.18 μm p MOSFET are analyzed using the test structure designed in our previous work [2].
Key concepts: Subthreshold conduction, Transconductance, CMOS, Subthreshold slope, MOSFET, Threshold voltage, Orientation (vector space), Electrical engineering