SOI (Silicon on Insulator) based integrated optoelectronics

SOI based integrated optoelectronics becomes more attractive subject,because its technologyis completely compatible with CMOS technology and it is possible to reduce the cost for SOI based OEIC.The progresses of SOI based integrated optoelectronic devices in recent years are reviewed in this paper,the emphasis is laid on the working principles and structures of several optical passive devices, including SOI optical waveguide, SOI optical waveguide coupler, SOI optical switch,PAWG (phase-shift arraywaveguide grating), SOI based photodetectors. The research developments in the State Key Laboratory on Integrated Optoelectronics (China) are also presented.