RECENT PROGRESS IN SOI-BASED OPTICAL WAVEGUIDE DEVICES
Mei Sun
Abstract
Mei Sun
Abstract
Recent years,with the maturation of facture technology of SOI(silicon-on-insulater) wafer,the research on SOI-based optical waveguide devices have attracted more and more attentions.In this paper,the recent developments in SOI-based optical waveguide devices,including bend waveguide,optical coupler,variable optical attenuator,optical modulator,optical switch,are reviewed.
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Recent years,with the maturation of facture technology of SOI(silicon-on-insulater) wafer,the research on SOI-based optical waveguide devices have attracted more and more attentions.In this paper,the recent developments in SOI-based optical waveguide devices,including bend waveguide,optical coupler,variable optical attenuator,optical modulator,optical switch,are reviewed.
Key concepts: Silicon on insulator, Optical attenuator, Waveguide, Attenuator (electronics), Silicon photonics, Optoelectronics, Optical switch, Wafer