Yu Jinzhong
Abstract
Silicon-on-insulator (abbreviated as SOI) optical waveguide is the base of silicon-based optical waveguide devices and other integrated optical devices.The characteristics of SOI materials,SOI optical waveguides and SOI optical switches,as ewll as the progress in research on them,are reviewed in this paper.
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Silicon-on-insulator (abbreviated as SOI) optical waveguide is the base of silicon-based optical waveguide devices and other integrated optical devices.The characteristics of SOI materials,SOI optical waveguides and SOI optical switches,as ewll as the progress in research on them,are reviewed in this paper.
Key concepts: Silicon on insulator, Waveguide, Silicon photonics, Optical switch, Optoelectronics, Materials science, Silicon, Slot-waveguide