2005Micronanoelectronic TechnologyRequires access

Self-Assembly:A Bottom-up Approach for Nanofabrication

Tseng Ampere

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Abstract

The key techniques based on the bottom-up self-assembly approach for nanofabrication are reviewed. Using self-assembly technique can deposit unpatterned and patterned materials on large-area substrate to fabricate local self-assembly device of nanostructure and molecule. The creation of nanoscale patterns by atom manipulation and dip-pen nanolithography,which are evolved from self-assembly techniques,are also evaluated and discussed. For all the techniques reviewed,the associated principles and procedures as well as their current and potential applications are included.

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What this paper is about

The key techniques based on the bottom-up self-assembly approach for nanofabrication are reviewed. Using self-assembly technique can deposit unpatterned and patterned materials on large-area substrate to fabricate local self-assembly device of nanostructure and molecule. The creation of nanoscale patterns by atom manipulation and dip-pen nanolithography,which are evolved from self-assembly techniques,are also evaluated and discussed. For all the techniques reviewed,the associated principles and procedures as well as their current and potential applications are included.

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Available abstract

The key techniques based on the bottom-up self-assembly approach for nanofabrication are reviewed. Using self-assembly technique can deposit unpatterned and patterned materials on large-area substrate to fabricate local self-assembly device of nanostructure and molecule. The creation of nanoscale patterns by atom manipulation and dip-pen nanolithography,which are evolved from self-assembly techniques,are also evaluated and discussed. For all the techniques reviewed,the associated principles and procedures as well as their current and potential applications are included.

Key concepts: Nanolithography, Nanotechnology, Nanostructure, Self-assembly, Dip-pen nanolithography, Nanoscopic scale, Key (lock), Materials science

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