2000•IEEE PotentialsRequires access
Nanofabrication using Coulomb crystals
Supriyo Bandyopadhyay, P. F. Williams
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Abstract
We describe a selective area transfer of a Coulomb crystal. This is the first step towards a hybrid nanofabrication scheme employing both self-assembly and lithography. We have coined a term for this process; we call it "nanoxerography" since that is more or less how a Xerox photocopier machine works. Such techniques can ultimately lead to the marriage of self-assembly with nanolithography.