Research on Novel Triaxial Piezoresistive Micro-Silicon Accelerometer

Micro Inertial systems and other high-precision occasions often require high-precision triaxial accelerometer to measure the three directions acceleration vector. To solve this kind of problems, a four-sides and eight-beams, triaxial piezoresistive micro-silicon accelerometer is introduced, three axial accelerations can be measured at the same time with high- precision using a single mass on silicon underlay and Wheatstone half-bridge structure. Furthermore the silicon-glass protecting structure for these accelerometers in the situation of over-loading and bulk process is designed. Through the ANSYS simulation and test it is validates that the structure is reasonable, and the relevant performance of the Micro-accelerometer is tested. The test results show that the micro-accelerometer has high precision and good linearity and satisfy design requirements.