The Design of a High Range Piezoresistive Micro Accelerometer
Sha Gong
Abstract
Sha Gong
Abstract
A high-range micro-accelerometer was designed to meet the requirement of overload environment. The mathematical model for the structure was proposed,and then the mechanical property was simulated. Finally,the test results were presented. It shows that the the sensitivity of the accelerometer is 193. 3μV / g,and it can work normally in overload environment.
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A high-range micro-accelerometer was designed to meet the requirement of overload environment. The mathematical model for the structure was proposed,and then the mechanical property was simulated. Finally,the test results were presented. It shows that the the sensitivity of the accelerometer is 193. 3μV / g,and it can work normally in overload environment.
Key concepts: Accelerometer, Piezoresistive effect, Sensitivity (control systems), Range (aeronautics), Property (philosophy), Computer science, Work (physics), Acoustics