Design of a Triaxial High-g Piezoresistive Microaccelerometer

This paper presents a method of designing a tri-axial high-gpiezo-resistive micro-accelerometer.First,the equivalent mechanics model of the micro-accelerometer is set up,and then the theoretical analysis of stress and frequency are conducted to obtain the structure parameters.Furthermore,FEM in ANSYS is used to determine the positions of piezo-resistors to gain a better output voltage signal.In the end,the performance of the micro-accelerometer is studied under 200 000 gloads in three axis,and results show that the presented micro-accelerometer is associated with high sensitivity and high linearity in the high-genvironment.