Research on Technique of Producing Trichlorosilane by Hydrogenation of Silicon Tetrachloride

It is difficult to recycle a large amount of by product,silicon tetrachloride,which is the technical bottleneck existing in preparation of polycrystalline silicon by improved Siemens process.Based on the technical bottleneck,this paper introduces the technique of producing trichlorosilane by hydrogenation of silicon tetrachloride,and studies the effect of action pressure,ration of hydrogen and silicon tetrachloride,action temperature and silicon powder layer's height on the technical conversation rate.Meanwhile,this paper also presents the application example of the technique in China silicon corporation LTD.,Luoyang.