Advance on Transformation of Silicon tetrachloride

Silicon tetrachloride as the largest by-produet during Siemens Process is a strongly corrosive chemieal substance.At present,for the domestic large scale production of polysilicon springing up soon,conversion into trichlorosilane is the most efficient method to solve the by-product silicon tetrachloride.Characteristic and researching progress of hydrogenation technology of silicon tetrachloride at home and abroad such as thermal hydrogenation,cold hydrogenation,plasma were introduced in this paper.