2013•Cailiao daobaoRequires access

Research Progress and Application of Hydrogenation Technology of Silicon Tetrachloride

Guangming Li

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Abstract

The hydrogenation of silicon tetrachloride is a reasonable and effective way to deal with silicon tetrachloride at present.The hydrogenation process is analyzed in principle,the main factors influencing hydrogenation are summarized,the reasonable suggestions are put forward,and the reference valuable are provided for the production of polysilicon.

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What this paper is about

The hydrogenation of silicon tetrachloride is a reasonable and effective way to deal with silicon tetrachloride at present.The hydrogenation process is analyzed in principle,the main factors influencing hydrogenation are summarized,the reasonable suggestions are put forward,and the reference valuable are provided for the production of polysilicon.

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Available abstract

The hydrogenation of silicon tetrachloride is a reasonable and effective way to deal with silicon tetrachloride at present.The hydrogenation process is analyzed in principle,the main factors influencing hydrogenation are summarized,the reasonable suggestions are put forward,and the reference valuable are provided for the production of polysilicon.

Key concepts: Silicon tetrachloride, Silicon, Materials science, Carbon tetrachloride, Process (computing), Tetrachloride, Nanotechnology, Organic chemistry

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