Large-area non-gradient-refractive-index microlens witn planar face

Large-area planar non-gradient-reftactiye-index refractive and diffractive microlens arrays fabricated by common thermal treatment method, gray-scale mask technique and ion beam etching and sputtering are discussed. The microstructure and microappearance of several microoptics deveces with planar face fabricated in different processing conditions ars analyzed qualitatively. Surface probe measurements are carried out to determine the dimension and the surface morphology of both large-area concave mask structures with sphere and arc outlines on quartz substrate fabricated by melting method and argon ion beam etching. The integrated structures, such as planar microlens array/IRCCD imaging chip and planar microlens array/semiconductor laser array, are studied briefly.