Large-area planar microlens for integrated near-field optical head

Large area non gradient index planar microlens (refractive and difractive microlens) are fabricated by both the common thermal treatment method and gray level masking technique. The microstructure and microappearance of several devices with planar end face are analyzed qualitatively. SEM measurement is carried out to determine the dimension and the surface morphology of the microlens array in quedz substrate. The integrated structures of the planar microlens and semiconductor laser device of integrated near field optical head are discussed respectively.