Large area Quartz Glass Microlens Array Fabricated by lon Beam Etching for Focal Plane Detectors

A large area quartz glass refractive microlens array mounted on a large area focal plane detecting architecture was fabricated using a multiple process, including photolithography, heat treatment, and argon ion beam etching. The experimental measurements show that the optical filling factor of the focal plane dtectors with refractive microlens array is more than 95% (for square based arch microlens) and 70% (for spherical microlens), respectively, the focal length of the square based arch microlens and spherical microlens is about 90μm and 80μm, respectively. Both the scanning electron microscope and the surface style measurement were used to determine the dimensions and the surface morphology of the microlens fabricated. The techniques utilized can be applied to fabricate microlens array of larger area.