A Contact and Non-contact Synthesis Measuring Profilometer
Tiebang Xie
Abstract
Tiebang Xie
Abstract
The principle, structure and experiment results of a synthesis measuring profilometer are presented. The system can select contact or non-contact measuring method. It is suitable for a wider range of applications compared with surface topography measuring instruments with only one measuring mode. The maximum vertical measuring range by the contact method can reach 3 mm with a minimum resolution of 0.005 μm and the range by the non-contact method can reach 500 μm with a minimum resolution of 0.01 μm.
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The principle, structure and experiment results of a synthesis measuring profilometer are presented. The system can select contact or non-contact measuring method. It is suitable for a wider range of applications compared with surface topography measuring instruments with only one measuring mode. The maximum vertical measuring range by the contact method can reach 3 mm with a minimum resolution of 0.005 μm and the range by the non-contact method can reach 500 μm with a minimum resolution of 0.01 μm.
Key concepts: Profilometer, Range (aeronautics), Optics, Resolution (logic), Materials science, Computer science, Physics, Surface finish