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2006•Bearing Jurnal Penelitian dan Kajian Teknik SipilOpen access

Contact-Measurement Surface Profilometer Based on Scanning White Light Interferometry Method

Tiebang Xie

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Abstract

A kind of surface profilometer based on white light interferometry is recommended,which is used to measure rolling bearing raceway and rolling element.The theoretical resolution is up to the order of nanometer.The measurable range of vertical and horizon are 5mm and 50mm,respectively.The structure and measuring principle of the system are described.It is verified that data processing is effective through test.

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What this paper is about

A kind of surface profilometer based on white light interferometry is recommended,which is used to measure rolling bearing raceway and rolling element.The theoretical resolution is up to the order of nanometer.The measurable range of vertical and horizon are 5mm and 50mm,respectively.The structure and measuring principle of the system are described.It is verified that data processing is effective through test.

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Available abstract

A kind of surface profilometer based on white light interferometry is recommended,which is used to measure rolling bearing raceway and rolling element.The theoretical resolution is up to the order of nanometer.The measurable range of vertical and horizon are 5mm and 50mm,respectively.The structure and measuring principle of the system are described.It is verified that data processing is effective through test.

Key concepts: Profilometer, White light interferometry, Optics, Interferometry, Raceway, Measure (data warehouse), White light, Materials science

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