Rong Dai, Tiebang Xie
Abstract
Based on the white-light interference,a vertical scanning white-light interfering profilometer was designed.The stage to realize the vertical scanning motion is analyzed.The vertical positioning of the profilometer is 1nm,and can be applied to measuring surface roughness,step height,film thickness etc.
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Based on the white-light interference,a vertical scanning white-light interfering profilometer was designed.The stage to realize the vertical scanning motion is analyzed.The vertical positioning of the profilometer is 1nm,and can be applied to measuring surface roughness,step height,film thickness etc.
Key concepts: Profilometer, Optics, White light, Materials science, Surface roughness, Interference (communication), Surface finish, Physics