Design and manufacture of silicon MEMS resonant gyroscope

As resonant sensing benefits from high resolution, large dynamic range and ease interfacing with digital signal processing, a novel structure with silicon microelectromechanical(MEMS) resonant gyroscope was presented. The paper described its operation principle, and derived the stable output of Mathieu equation of double-ended tuning fork(DETF)’s vibration. Based on the magnitude and phase frequency characteristics of the Bessel-curves-cluster decomposition signal of the above stable output, the characteristics analysis and the simulation with Matlab were made. Then a method was presented which used ωr0 or ωr0+ωp component of DETF’s output signal xr to solve the Coriolis force in order to realize the detection on input rate ? . A specimen with the new structure was achieved by using SOG technique. The study shows that the new structure of the MEMS gyroscope is with a quasi-digital output and can effectively increrase the signal-to -noise ratio of its output signal.