ScholarLens Back to search
2009•Journal of Chinese Inertial TechnologyRequires access

Design and simulation of novel MEMS resonant gyroscope

Guo Zhan-she

Open publisher page 0 citations

Abstract

A novel silicon microelectromechanical(MEMS) resonant gyroscope was presented.Its advantages include a quasi-digital FM(frequency modulation) output,high sensitivity,high linearity,self-decoupled,etc.The structure includes proof masses,cantilevers,two-stage amplifying leverage mechanisms,double-ended tuning fork(DETF),driving and sensing combs.Two-stage amplifying leverage mechanisms,outboard masses,frame construction etc are used to improve the performance of the structure.The simulation results show that the sensitivity of the gyroscope is 0.309 Hz/(deg·s-1),and the maximum relative deviation is 9.4×10-8 on the measurement range(±300deg/s).In the driven direction,the amplitude of DETF is 2.96×10-6 times as big as its of the external mass.This shows that it has excellent decoupling capability.

About this research paper

What this paper is about

A novel silicon microelectromechanical(MEMS) resonant gyroscope was presented.Its advantages include a quasi-digital FM(frequency modulation) output,high sensitivity,high linearity,self-decoupled,etc.The structure includes proof masses,cantilevers,two-stage amplifying leverage mechanisms,double-ended tuning fork(DETF),driving and sensing combs.Two-stage amplifying leverage mechanisms,outboard masses,frame construction etc are used to improve the performance of the structure.The simulation results show that the sensitivity of the gyroscope is 0.309 Hz/(deg·s-1),and the maximum relative deviation is 9.4×10-8 on the measurement range(±300deg/s).In the driven direction,the amplitude of DETF is 2.96×10-6 times as big as its of the external mass.This shows that it has excellent decoupling capability.

Why it matters

A significance statement is not available in the OpenAlex record.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

A novel silicon microelectromechanical(MEMS) resonant gyroscope was presented.Its advantages include a quasi-digital FM(frequency modulation) output,high sensitivity,high linearity,self-decoupled,etc.The structure includes proof masses,cantilevers,two-stage amplifying leverage mechanisms,double-ended tuning fork(DETF),driving and sensing combs.Two-stage amplifying leverage mechanisms,outboard masses,frame construction etc are used to improve the performance of the structure.The simulation results show that the sensitivity of the gyroscope is 0.309 Hz/(deg·s-1),and the maximum relative deviation is 9.4×10-8 on the measurement range(±300deg/s).In the driven direction,the amplitude of DETF is 2.96×10-6 times as big as its of the external mass.This shows that it has excellent decoupling capability.

Key concepts: Tuning fork, Vibrating structure gyroscope, Gyroscope, Proof mass, Microelectromechanical systems, Decoupling (probability), Amplitude, Linearity

Related papers

Related paper 1Related paper 2Related paper 3
Back to paper searchBrowse research topicsOriginal source
Design and simulation of novel MEMS resonant gyroscope — Research Paper | ScholarLens