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2003•Journal of Chinese Inertial TechnologyRequires access

Silicon Micromechanical Resonant Gyroscope

Anping Qiu

Open publisher page 1 citations

Abstract

The operation principle of an integrated micromechanical vibratory rate gyroscope was described based on resonant sensing of the Coriolis force. The structure of gyroscope and doubled end tuning fork (DETF) were introduced, the equations on gyroscope and DETF were discussed in detail, and the ranges of designing parameters are presented. It is showed that the new silicon micromechanical resonant output gyroscope will be widely used in the future.

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What this paper is about

The operation principle of an integrated micromechanical vibratory rate gyroscope was described based on resonant sensing of the Coriolis force. The structure of gyroscope and doubled end tuning fork (DETF) were introduced, the equations on gyroscope and DETF were discussed in detail, and the ranges of designing parameters are presented. It is showed that the new silicon micromechanical resonant output gyroscope will be widely used in the future.

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Available abstract

The operation principle of an integrated micromechanical vibratory rate gyroscope was described based on resonant sensing of the Coriolis force. The structure of gyroscope and doubled end tuning fork (DETF) were introduced, the equations on gyroscope and DETF were discussed in detail, and the ranges of designing parameters are presented. It is showed that the new silicon micromechanical resonant output gyroscope will be widely used in the future.

Key concepts: Gyroscope, Tuning fork, Vibrating structure gyroscope, Rate integrating gyroscope, Microelectromechanical systems, Silicon, Control theory (sociology), Materials science

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