2003•Micronanoelectronic TechnologyRequires access
A novel piezoresistive accelerometer with high accuracy and overload ability
Zeng Zhao
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Abstract
Design and simulation of a novel accelerometer sensor with high accuracy and overload ability, which can undergo 150000g acceleration are presented. And its principle is explained, and a new cross structure is designed. At the same time, the impact experiment has been done, and the reliability tests have also been carried out. We also optimized its structure through modal analysis by using of ANSYS. At last, the electrical layout and processing have been developed.