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电化学原子层沉积研究现状及沉积体系的构建
Wang, Li-Shi, Zhang, Guo-Qing, C. Record, M., Bu, Zhi-Xiang, Sun, Li
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Abstract
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Wang, Li-Shi, Zhang, Guo-Qing, C. Record, M., Bu, Zhi-Xiang, Sun, Li
Abstract
International audience
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Key concepts: Atomic layer deposition, Atomic layer epitaxy, Materials science, Nanotechnology, Electrochemistry, Thin film, Optoelectronics, Chemical engineering