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1997•한국고분자학회 학술대회 연구논문 초록집Requires access

Silicon Containing Positive Resist for ArF Excimer Laser Lithography

이해원, 김영대, 강영종, 김응렬, 박춘근, 최상준

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Key concepts: Resist, Lithography, Excimer laser, Materials science, Optics, Optoelectronics, Silicon, Excimer

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