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2009•한국진공학회 학술발표회초록집Requires access

Effect of growth temperature of Ga doped ZnO thin films by pulsed DC magnetron sputtering

Juho Kim, Ki-Seok An, Sun Sook Lee, Eunkyoung Nam, Young Sung Kim

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Key concepts: Sputter deposition, Materials science, Doping, Pulsed DC, Thin film, Optoelectronics, Cavity magnetron, Sputtering

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