2007•한국진공학회 학술발표회초록집Requires access

The structural and electrical properties of annealing effect of Ga doped ZnO thin films on glass substrate grown by RF magnetron sputtering

J.S. Lee, H.H. Jeon, G.C. Kim, S.J. Hwangboe, D.H. Kim, Wonseok Choi, Minhyon Jeon

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Key concepts: Materials science, Annealing (glass), Sputter deposition, Doping, Thin film, Sputtering, Substrate (aquarium), Optoelectronics

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The structural and electrical properties of annealing effect of Ga doped ZnO thin films on glass substrate grown by RF magnetron sputtering — Research Paper | ScholarLens