2007•한국진공학회 학술발표회초록집Requires access

The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering

G.C. Kim, Hyeong-Tag Jeon, S.J. Hwangboe, J.S. Lee, D.H. Kim, Won‐Youl Choi, Minhyon Jeon

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Key concepts: Sputter deposition, Materials science, Annealing (glass), Optoelectronics, Sputtering, High-power impulse magnetron sputtering, Cavity magnetron, Metallurgy

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The effect of annealing temperature on structural and optical properties of ZnO films deposited by rf magnetron sputtering — Research Paper | ScholarLens