2011•Lecture notes in electrical engineeringRequires access

Towards MEMS Fabrication by Silicon Electrochemical Micromachining Technology

M. Bassu, Lucanos Marsilio Strambini, Giuseppe Barillaro

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Key concepts: Microelectromechanical systems, Surface micromachining, Fabrication, Bulk micromachining, Materials science, Silicon, Substrate (aquarium), Nanotechnology

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