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The fabrication technology of electrochemical micromachining

Liu Jiangwen

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Abstract

The principle of electrochemical micromachining(EMM) is introduced in this paper. The main fabrication technology of EMM, such as EMM by the tip of EC-SPM,electrochemical fabrication (EFAB), confined etchant layer technique (CELT) and super-micro pole of EMM, are described in detail.

About this research paper

What this paper is about

The principle of electrochemical micromachining(EMM) is introduced in this paper. The main fabrication technology of EMM, such as EMM by the tip of EC-SPM,electrochemical fabrication (EFAB), confined etchant layer technique (CELT) and super-micro pole of EMM, are described in detail.

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Method / approach

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Available abstract

The principle of electrochemical micromachining(EMM) is introduced in this paper. The main fabrication technology of EMM, such as EMM by the tip of EC-SPM,electrochemical fabrication (EFAB), confined etchant layer technique (CELT) and super-micro pole of EMM, are described in detail.

Key concepts: Fabrication, Surface micromachining, Electrochemistry, Materials science, Layer (electronics), Bulk micromachining, Nanotechnology, Chemistry

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