2016•Microelectronic EngineeringRequires access

Single-mode-resonance interference in photoresist sub-micron waveguide for high exposure depth nanolithography

Zheng Yang, Zhiyou Zhang, Peng Wu, Liangping Xia, Shaoyun Yin, Jinglei Du

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Key concepts: Photoresist, Interference lithography, Nanolithography, Grating, Lithography, Materials science, Interference (communication), Photolithography

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