2015•Journal of Materials Engineering and PerformanceRequires access

Investigation into the Effect of Concentration of Benzotriazole on the Selective Layer Surface in the Chemical Mechanical Planarization Process

Filip Ilie, Tiberiu Laurian

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Key concepts: Chemical-mechanical planarization, Benzotriazole, Slurry, Materials science, Layer (electronics), Surface modification, Corrosion, Chemical engineering

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Investigation into the Effect of Concentration of Benzotriazole on the Selective Layer Surface in the Chemical Mechanical Planarization Process — Research Paper | ScholarLens