2007•Applied Surface ScienceRequires access

Relative roles of acetic acid, dodecyl sulfate and benzotriazole in chemical mechanical and electrochemical mechanical planarization of copper

P.C. Goonetilleke, D. Roy

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Key concepts: Chemical-mechanical planarization, Benzotriazole, Electrochemistry, Copper, Dissolution, Acetic acid, Electrolyte, Chemistry

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Relative roles of acetic acid, dodecyl sulfate and benzotriazole in chemical mechanical and electrochemical mechanical planarization of copper — Research Paper | ScholarLens