2007•한국진공학회 학술발표회초록집Requires access

Effect of annealing on RF sputtered aluminum nitride buffer layers for GaN growth

Junsong Yang, S.M. Kang, Chang-Hwa Jung, W. J. Park, Dong-Hee Yoon

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Key concepts: Annealing (glass), Nitride, Buffer (optical fiber), Materials science, Optoelectronics, Aluminium, Gallium nitride, Wide-bandgap semiconductor

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Effect of annealing on RF sputtered aluminum nitride buffer layers for GaN growth — Research Paper | ScholarLens