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A Novel Bulk Micromachining Method in Gallium Arsenide

Dong‐il Cho, Jongpal Kim, Setae Kim, Sang-Jun Park, Seung‐Joon Paik, Chiwan Ku, Seung-Ki Lee

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Key concepts: Surface micromachining, Undercut, Gallium arsenide, Materials science, Bulk micromachining, Etching (microfabrication), Optoelectronics, Substrate (aquarium)

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