2005•Microsystem TechnologiesRequires access

Bulk micromachining fabrication platform using the integration of DRIE and wet anisotropic etching

Huai-Yuan Chu, Weileun Fang

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Key concepts: Deep reactive-ion etching, Fabrication, Surface micromachining, Bulk micromachining, Etching (microfabrication), Materials science, Reactive-ion etching, Anisotropy