The Effects of Processing on EEPROM Reliability
David A. Baglee, Taizo SUGAWARA, S. Fukawa, Kazuya Mori, L.M. Bellay, T. Miller
Abstract
David A. Baglee, Taizo SUGAWARA, S. Fukawa, Kazuya Mori, L.M. Bellay, T. Miller
Abstract
EEPROMs have one significant advantage over the more common EPROM. This is in the ease with which data can be changed in just a matter of milliseconds. In this paper we will investigate the effects that the various critical process steps can have on the two key reliability aspects of these memories, namely: Data Retention and Write/Erase endurance. In particular we will examine effects of the tunnel oxidation conditions and protective overcoat type on these parameters.
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EEPROMs have one significant advantage over the more common EPROM. This is in the ease with which data can be changed in just a matter of milliseconds. In this paper we will investigate the effects that the various critical process steps can have on the two key reliability aspects of these memories, namely: Data Retention and Write/Erase endurance. In particular we will examine effects of the tunnel oxidation conditions and protective overcoat type on these parameters.
Key concepts: EPROM, EEPROM, Reliability (semiconductor), Data retention, Computer science, Non-volatile memory, Reliability engineering, Process (computing)