2009•Journal of Wuhan University of Technology-Mater Sci EdRequires access

Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering

Zhongtian Yang, Li-Ya Zhu, Bing Yang, Liping Guo, Dejun Fu

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Key concepts: Materials science, Tin, Microstructure, Cathode, Sputter deposition, Amorphous solid, Cavity magnetron, Metallurgy

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Structure and properties of Ti-Si-N coatings synthesized by combining cathode arc and middle-frequency magnetron sputtering — Research Paper | ScholarLens