2010•Korean Journal of Chemical EngineeringRequires access

Study on electrochemical mechanical polishing process of copper circuit on PCB

Nadiia Kulyk, Chang Yong An, Jung Hoon Oh, Sung‐Min Cho, Changsup Ryu, Young Kwan Ko, Chan‐Hwa Chung

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Key concepts: Chemical-mechanical planarization, Polishing, Materials science, Copper, Process (computing), Electrochemistry, Composite material, Metallurgy

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