2007•TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems ConferenceRequires access
Optofluidic Maskless Lithography System
Seok Chung, Wook Park, Hyun-Sung Park, Kyoungsik Yu, Namkyoo Park, Sunghoon Kwon
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Abstract
We propose and demonstrate an optofluidic maskless lithography technique to fabricate various polymer microparticles and microwires in microfluidic channels. Combining maskless lithography and microfluidic systems, we demonstrate temporal and spatial control of polymeric micro structure generation in microfluidic channels.