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A 2D scanner by surface and bulk micromachined vertical comb actuators

Wibool Piyawattanametha, Pamela Patterson, Dooyoung Hah, Hiroshi Toshiyoshi, Ming C. Wu

Open publisher page 31 citations

Abstract

We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion- etching (DRIE) post process. Surface-micromachining provides versatile mechanical design and electrical interconnect while bulk micromachining offers flat micromirrors and high-force actuators. The scanner achieves DC mechanical scanning ranges of /spl plusmn/6.2/spl deg/ (at 55 Vdc) and /spl plusmn/4.1/spl deg/ (at 50 Vdc) for the inner and outer gimbals, respectively. The 1-mm mirror has a radius of curvature of 40 cm.

About this research paper

What this paper is about

We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion- etching (DRIE) post process. Surface-micromachining provides versatile mechanical design and electrical interconnect while bulk micromachining offers flat micromirrors and high-force actuators. The scanner achieves DC mechanical scanning ranges of /spl plusmn/6.2/spl deg/ (at 55 Vdc) and /spl plusmn/4.1/spl deg/ (at 50 Vdc) for the inner and outer gimbals, respectively. The 1-mm mirror has a radius of curvature of 40 cm.

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Available abstract

We present the design, fabrication, and demonstration of a fully decoupled 2D gimbal scanner with angular vertical comb (AVC) actuators. The device is realized by combining a foundry surface-micromachining process (MUMPs) with a 3-mask deep-reactive-ion- etching (DRIE) post process. Surface-micromachining provides versatile mechanical design and electrical interconnect while bulk micromachining offers flat micromirrors and high-force actuators. The scanner achieves DC mechanical scanning ranges of /spl plusmn/6.2/spl deg/ (at 55 Vdc) and /spl plusmn/4.1/spl deg/ (at 50 Vdc) for the inner and outer gimbals, respectively. The 1-mm mirror has a radius of curvature of 40 cm.

Key concepts: Gimbal, Surface micromachining, Deep reactive-ion etching, Comb drive, Materials science, Scanner, Bulk micromachining, Actuator

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