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2002•Sensors and Actuators A PhysicalRequires access

A high-aspect-ratio two-axis electrostatic microactuator with extended travel range

Yu Sun, D. Piyabongkarn, Serdar Sezen, Bradley J. Nelson, Rajesh Rajamani

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Key concepts: Deep reactive-ion etching, Comb drive, Microactuator, Silicon on insulator, Wafer, Materials science, Fabrication, Transverse plane

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